Modeling of Chemical Vapor Deposition of Tungsten Films

Author:   Chris R. Kleijn ,  Christoph Werner
Publisher:   Birkhauser Verlag AG
Volume:   Vol 2
ISBN:  

9783764328580


Pages:   139
Publication Date:   January 1993
Format:   Hardback
Availability:   Out of stock   Availability explained


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Modeling of Chemical Vapor Deposition of Tungsten Films


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Author:   Chris R. Kleijn ,  Christoph Werner
Publisher:   Birkhauser Verlag AG
Imprint:   Birkhauser Verlag AG
Volume:   Vol 2
Weight:   0.340kg
ISBN:  

9783764328580


ISBN 10:   3764328584
Pages:   139
Publication Date:   January 1993
Audience:   College/higher education ,  Professional and scholarly ,  Undergraduate ,  Postgraduate, Research & Scholarly
Format:   Hardback
Publisher's Status:   Out of Print
Availability:   Out of stock   Availability explained

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