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OverviewFull Product DetailsAuthor: W. Menz , J. Mohr , O. PaulPublisher: Wiley-VCH Verlag GmbH Imprint: Wiley-VCH Verlag GmbH Edition: 2nd Revised edition Dimensions: Width: 18.10cm , Height: 3.10cm , Length: 24.30cm Weight: 1.106kg ISBN: 9783527296347ISBN 10: 3527296344 Pages: 512 Publication Date: 16 January 2001 Audience: Professional and scholarly , Professional & Vocational Format: Hardback Publisher's Status: Out of Print Availability: Awaiting stock  Table of ContentsGeneral Introduction to Microstructure Technology. The Parallels to Microelectronics. The Physical and Chemical Basics in Microtechnology. Basic Technologies in MEMS. Lithography. Silicon Microsystem Technology. The LIGA Process. Alternative Processes of Microstructuring. Packaging and Interconnecting Techniques (PIT). System Technology. Literatur.Reviews"""The literature is up to date and the index is broad. It is well presented with diagrams, drawings and excellent micrographs that attract the reader and also explain the subjects visually."" (Materials World, November 2001) ""...covers the basic concepts in the field and recent trends in the discipline..."" (SciTech Book News, Vol. 26, No. 2, June 2002)" The literature is up to date and the index is broad. It is well presented with diagrams, drawings and excellent micrographs that attract the reader and also explain the subjects visually. (Materials World, November 2001) ...covers the basic concepts in the field and recent trends in the discipline... (SciTech Book News, Vol. 26, No. 2, June 2002) Author InformationTab Content 6Author Website:Countries AvailableAll regions |
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