Overview

The goal of this book is to bring together into one accessible text the fundamentals of the many disciplines needed by engineers working in the field of microelectromechanical systems (MEMS). The subject matter is wide-ranging: microfabrication, mechanics, heat flow, electronics, noise, and dynamics of systems, with and without feedback. Because it is very difficult to enunciate principles of ""good design"" in the abstract, the book is organized around a set of case studies that are based on real products, or, where appropriately well-documented products could not be found, on published prototype work. The case studies were selected to sample a multi-dimensional space: different manufacturing and fabrication methods, different device applications, and different physical effects used for transduction. The case study subjects are: the design and packaging of a piezoresistive pressure sensor, a capacitively-sensed accelerometer, a quartz piezoelectrically-driven and sensed rate gyroscope, two electrostatically-actuated optical projection displays, two microsystems for the amplification of DNA, and a catalytic sensor for combustible gases. This book is used for a graduate course in ""Design and Fabrication of Micro-electromechanical Devices (MEMS)"" at the Massachusetts Institute of Technology. It is appropriate for textbook use by senior/graduate courses in MEMS, and should be a useful reference for the active MEMS professional. Each chapter is supplemented with homework problems and suggested related reading. In addition, the book is supported by a web site that will include additional homework exercises, suggested design problems and related teaching materials, and software used in the textbook examples and homework problems.

Full Product Details

Author:   Stephen D. Senturia
Publisher:   Springer
Imprint:   Springer
Edition:   1st ed. 2000. Corr. 2nd printing 2004
Dimensions:   Width: 15.50cm , Height: 3.80cm , Length: 23.50cm
Weight:   2.600kg
ISBN:  

9780792372462

ISBN 10:   0792372468
Pages:   689
Publication Date:   30 November 2000
Audience:   College/higher education ,  Professional and scholarly ,  Postgraduate, Research & Scholarly ,  Professional & Vocational
Format:   Hardback
Publisher's Status:   Active
Availability:   In Print  
This item will be ordered in for you from one of our suppliers. Upon receipt, we will promptly dispatch it out to you. For in store availability, please contact us.

Table of Contents

Getting Started.- An Approach to Mems Design.- Microfabrication.- Process Integation.- Modeling Strategies.- Lumped Modeling with Circuit Elements.- Energy-conserving Transducers.- Lumped-element System Dynamics.- Domain-Specific Details.- Elasticity.- Structures.- Energy Methods.- Dissipation and the Thermal Energy Domain.- Lumped Modeling of Dissipative Processes.- Fluids.- Circuit and System Issues.- Electronics.- Feedback Systems.- Noise.- Case Studies.- Packaging.- A Piezoresistive Pressure Sensor.- A Capacitive Accelerometer.- Electrostatic Projection Displays.- A Piezoelectric Rate Gyroscope.- Microsystems for DNA Amplification.- A Microbridge Combustible-gas Sensor.

Reviews

Author Information

Tab Content 6

Author Website:  

Customer Reviews

Recent Reviews

No review item found!

Add your own review!

Countries Available

All regions