Overview

Test structures are a crucial part of the manufacture of microelectronics, relaying information on the success of manufacturing processes and on process yield. Sophisticated test structures are now a part of every semiconductor wafer. This book serves as both a text and a professional's reference, detailing the types of structures needed to extract different types of information and providing a guide to parameter extraction, test structure design, and the analysis of the resulting data.

Full Product Details

Author:   Alan J. Walton
Publisher:   Kluwer Academic Publishers Group
Imprint:   Kluwer Academic Publishers
Weight:   0.333kg
ISBN:  

9780442016388

ISBN 10:   0442016387
Pages:   250
Publication Date:   01 December 1998
Audience:   College/higher education ,  Professional and scholarly ,  General/trade ,  Postgraduate, Research & Scholarly ,  Professional & Vocational
Format:   Hardback
Publisher's Status:   Active
Availability:   Out of stock  
The supplier is temporarily out of stock of this item. It will be ordered for you on backorder and shipped when it becomes available.

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