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OverviewA collection of 40 papers on microelectronic device technology. It addresses: dielectrics/gate technology; source/drain junctions and salicide; integration and manufacturability; and other issues. Full Product DetailsAuthor: Burnett , Dirk Wristers , Toshiaki TsuchiyaPublisher: SPIE Press Imprint: SPIE Press Volume: Vol 3506 ISBN: 9780819429650ISBN 10: 0819429651 Pages: 364 Publication Date: 31 October 1998 Audience: Professional and scholarly , Professional & Vocational Format: Paperback Publisher's Status: Active Availability: To order Stock availability from the supplier is unknown. We will order it for you and ship this item to you once it is received by us. Table of ContentsReviewsAuthor InformationTab Content 6Author Website:Countries AvailableAll regions |