Microelectronic Applications of Chemical Mechanical Planarization

Author:   Yuzhuo Li
Publisher:   John Wiley & Sons
ISBN:  

9786611094164


Pages:   762
Publication Date:   04 December 2007
Format:   Electronic book text
Availability:   Out of stock   Availability explained
The supplier is temporarily out of stock of this item. It will be ordered for you on backorder and shipped when it becomes available.

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Microelectronic Applications of Chemical Mechanical Planarization


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Overview

An authoritative, systematic, and comprehensive description of current CMP technology
Chemical Mechanical Planarization (CMP) provides the greatest degree of planarization of any known technique. The current standard for integrated circuit (I

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Author:   Yuzhuo Li
Publisher:   John Wiley & Sons
Imprint:   John Wiley & Sons
ISBN:  

9786611094164


ISBN 10:   6611094164
Pages:   762
Publication Date:   04 December 2007
Audience:   General/trade ,  General
Format:   Electronic book text
Publisher's Status:   Active
Availability:   Out of stock   Availability explained
The supplier is temporarily out of stock of this item. It will be ordered for you on backorder and shipped when it becomes available.

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