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OverviewAn authoritative, systematic, and comprehensive description of current CMP technology Full Product DetailsAuthor: Yuzhuo LiPublisher: John Wiley & Sons Imprint: John Wiley & Sons ISBN: 9786611094164ISBN 10: 6611094164 Pages: 762 Publication Date: 04 December 2007 Audience: General/trade , General Format: Electronic book text Publisher's Status: Active Availability: Out of stock The supplier is temporarily out of stock of this item. It will be ordered for you on backorder and shipped when it becomes available. Table of ContentsReviewsAuthor InformationTab Content 6Author Website:Countries AvailableAll regions |