MEMS Vibratory Gyroscopes: Structural Approaches to Improve Robustness

Author:   Cenk Acar ,  Andrei Shkel
Publisher:   Springer-Verlag New York Inc.
Edition:   Softcover reprint of hardcover 1st ed. 2009
ISBN:  

9780387095356


Pages:   260
Publication Date:   23 October 2008
Format:   Hardback
Availability:   In Print   Availability explained
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MEMS Vibratory Gyroscopes: Structural Approaches to Improve Robustness


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Overview

MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In the second part, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material.

Full Product Details

Author:   Cenk Acar ,  Andrei Shkel
Publisher:   Springer-Verlag New York Inc.
Imprint:   Springer-Verlag New York Inc.
Edition:   Softcover reprint of hardcover 1st ed. 2009
Dimensions:   Width: 15.50cm , Height: 1.50cm , Length: 23.50cm
Weight:   0.576kg
ISBN:  

9780387095356


ISBN 10:   0387095357
Pages:   260
Publication Date:   23 October 2008
Audience:   College/higher education ,  Postgraduate, Research & Scholarly
Format:   Hardback
Publisher's Status:   Active
Availability:   In Print   Availability explained
This item will be ordered in for you from one of our suppliers. Upon receipt, we will promptly dispatch it out to you. For in store availability, please contact us.

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From the reviews: This book reviews the principles of linear and torsional dynamics of vibratory gyroscopes. ! The book provides a comprehensive review of the state-of-the-art of MCGs that would undoubtedly be useful for specialist engineers. (Benu Chatterjee, Materials World, March, 2011)


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