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Author:   Rajendra M. Patrikar (Professor, VNIT Nagpur, Center of VLSI and Nanotechnology, India)
Publisher:   Institution of Engineering and Technology
Imprint:   Institution of Engineering and Technology
ISBN:  

9781785618963

ISBN 10:   1785618962
Pages:   432
Publication Date:   15 June 2020
Audience:   College/higher education ,  Professional and scholarly ,  Tertiary & Higher Education ,  Professional & Vocational
Format:   Hardback
Publisher's Status:   Active
Availability:   In Print  
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Table of Contents

Chapter 1: Introduction Chapter 2: Filter design Chapter 3: Microelectromechanical resonators design: low-frequency resonators Chapter 4: Microelectromechanical resonator design for high frequency Chapter 5: Finite-element modeling of RF MEMS resonators Chapter 6: Fabrication of low-frequency resonators Chapter 7: Fabrication of high-frequency resonators Chapter 8: Filter and oscillator design using SAW/BAW resonators Chapter 9: Testing and verification of MEMS resonator filters Chapter 10: 3D packaging for the integration of heterogeneous systems Chapter 11: Reliability issues of MEMS resonators

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Author Information

Rajendra M. Patrikar is a professor of electronics at the Center of VLSI and Nanotechnology, VNIT Nagpur, India. He has published about 45 papers in International Journals and 85 papers in international refereed conferences and 20 papers in national conferences. He is a Fellow of IETE, Life member of ISSS, senior member of IEEE and Member of SPIE and ISA. He is also involved in the incubation of technology companies at VNIT.

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