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OverviewThin films play a key role in the material science of microelectronics, and the subject matter of thin-films divides naturally into two headings: processing/structure relationship, and structure/properties relationship. The first volume of Materials Science in Microelectronics focuses on the first relationship that between processing and the structure of the thin-film. The state of the thin films surface during the period that one monolayer exists - before being buried in the next layer determines the ultimate structure of the thin film, and thus its properties. This volume takes into consideration the following potential influencing factors: crystal defects, void structure, grain structure, interface structure in epitaxial films, the structure of amorphous films, and reaction-induced structure. This is an ideal text or reference work for students and researchers in material science, who need to learn the basics of thin films. Full Product DetailsAuthor: E S MachlinPublisher: Elsevier Science & Technology Imprint: Elsevier Science & Technology ISBN: 9786610637782ISBN 10: 6610637784 Pages: 270 Publication Date: 01 January 2005 Audience: General/trade , General Format: Electronic book text Publisher's Status: Active Availability: Out of stock  The supplier is temporarily out of stock of this item. It will be ordered for you on backorder and shipped when it becomes available. Table of ContentsReviewsAuthor InformationTab Content 6Author Website:Countries AvailableAll regions |
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