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OverviewLithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components. Full Product DetailsAuthor: S LandisPublisher: John Wiley & Sons Inc Imprint: John Wiley & Sons Inc Dimensions: Width: 15.00cm , Height: 1.50cm , Length: 25.00cm Weight: 3.436kg ISBN: 9781118557662ISBN 10: 1118557662 Pages: 320 Publication Date: 07 March 2013 Audience: Professional and scholarly , Professional & Vocational Format: Digital Publisher's Status: Active Availability: Not yet available  This item is yet to be released. You can pre-order this item and we will dispatch it to you upon its release. Table of ContentsReviewsAuthor InformationStefan Landis works at CEA-LETI-Minatec in Grenoble, France. He also lectures on next generation lithography in numerous engineering schools in France and in CEI-Europe Advanced Technology Education. Tab Content 6Author Website:Countries AvailableAll regions |
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