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OverviewIntroductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on MEMS transducers: principles of operation, modeling from first principles, and a detailed look at commercialized MEMS devices, in addition to microfluidics. Multiple field-tested laboratory exercises are included, designed to facilitate student learning about the fundamentals of microfabrication processes. References, suggested reading, review questions, and homework problems are provided at the close of each chapter. Introductory MEMS: Fabrication and Applications is an excellent introduction to the subject, with a tested pedagogical structure and an accessible writing style suitable for students at an advanced undergraduate level across academic disciplines. Full Product DetailsAuthor: Thomas M. Adams , Richard A. LaytonPublisher: Springer-Verlag New York Inc. Imprint: Springer-Verlag New York Inc. Edition: 2010 ed. Dimensions: Width: 15.50cm , Height: 2.40cm , Length: 23.50cm Weight: 0.700kg ISBN: 9781489984210ISBN 10: 1489984216 Pages: 440 Publication Date: 07 September 2014 Audience: Professional and scholarly , Professional & Vocational Format: Paperback Publisher's Status: Active Availability: Manufactured on demand  We will order this item for you from a manufactured on demand supplier. Table of ContentsFabrication.- The substrate and adding material to it.- Creating and transferring patterns#x2014;Photolithography.- Creating structures#x2014;Micromachining.- Solid mechanics.- Applications.- Thinking about modeling.- MEMS transducers#x2014;An overview of how they work.- Piezoresistive transducers.- Capacitive transducers.- Piezoelectric transducers.- Thermal transducers.- to microfluidics.- Laboratories.- Microfabrication laboratories.ReviewsAuthor InformationTab Content 6Author Website:Countries AvailableAll regions |
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