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OverviewSemiconductor technologies are moving at such a fast pace that new materials are needed in all types of application. Manipulating the materials and their properties at atomic dimensions has become a must. This book presents the case of interlayer dielectrics materials whilst considering these challenges. Interlayer Dielectrics for Semiconductor Technologies cover the science, properties and applications of dielectrics, their preparation, patterning, reliability and characterisation, followed by the discussion of different materials including those with high dielctric constants and those useful for waveguide applications in optical communications on the chip and the package. Full Product DetailsAuthor: Shyam P Muraka , Moshe Eizenberg , Ashok K SinhaPublisher: Elsevier Science Publishing Co Inc Imprint: Academic Press Inc Volume: v. 1 Dimensions: Width: 16.50cm , Height: 2.50cm , Length: 24.00cm Weight: 1.040kg ISBN: 9780125112215ISBN 10: 0125112211 Pages: 464 Publication Date: 13 October 2003 Audience: Professional and scholarly , Professional & Vocational Format: Hardback Publisher's Status: Out of Print Availability: In Print  Limited stock is available. It will be ordered for you and shipped pending supplier's limited stock. Table of ContentsDialectric Properties, Characterization of Low Dielectric Constant Materials, Compatibilities of Dielectric Film, Silicon Based Dielectrics, Low K Polymers, Chemical Vapour Deposition of CF Low K Materials, Nanoporous Dielectric Films: Fundamental Property Relations and Microelectronic Applications, High K Dielectrics Grown by Atomic Layer Disposition, Dielectric Materials in Optical Waveguide Applications, Reliability, Future Trends in Silicon Technologies.ReviewsAuthor InformationBy Shyam P Muraka Tab Content 6Author Website:Countries AvailableAll regions |
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