Overview

An in-depth look at the state of the art of in situ real-time monitoring and analysis of thin films With thin film deposition becoming increasingly critical in the production of advanced electronic and optical devices, scientists and engineers working in this area are looking for in situ, real-time, structure-specific analytical tools for characterizing phenomena occurring at surfaces and interfaces during thin film growth. This volume brings together contributed chapters from experts in the field, covering proven methods for in situ real-time analysis of technologically important materials such as multicomponent oxides in different environments. Background information and extensive references to the current literature are also provided. Readers will gain a thorough understanding of the growth processes and become acquainted with both emerging and more established methods that can be adapted for in situ characterization. Methods and their most useful applications include: Low-energy time-of-flight ion scattering and direct recoil spectroscopy (TOF-ISRAS) for studying multicomponent oxide film growth processes Reflection high-energy electron diffraction (RHEED) for determining the nature of chemical reactions at film surfaces Spectrometric ellipsometry (SE) for use in the analysis of semiconductors and other multicomponent materials Reflectance spectroscopy and transmission electron microscopy for monitoring epitaxial growth processes X-ray fluorescence spectroscopy for studying surface and interface structures And other cost-effective techniques for industrial application

Full Product Details

Author:   Orlando Auciello ,  Alan R. Krauss
Publisher:   John Wiley and Sons Ltd
Imprint:   John Wiley & Sons Inc
Dimensions:   Width: 18.60cm , Height: 1.80cm , Length: 24.50cm
Weight:   0.566kg
ISBN:  

9780471241416

ISBN 10:   0471241415
Pages:   280
Publication Date:   20 November 2000
Audience:   College/higher education ,  Professional and scholarly ,  Undergraduate ,  Postgraduate, Research & Scholarly
Format:   Hardback
Publisher's Status:   Out of Stock Indefinitely
Availability:   Out of stock  

Table of Contents

Ion Beam Deposition and Surface Characterization of Thin Multicomponent Oxide Films During Growth (A. Krauss, et al.); Reflection High-Energy Electron Diffraction as a Tool for Real-Time Characterization of Growth of Complex Oxides (I. Bozovic, et al.); In Situ Real-Time Characterization of Surfaces and Film Growth Processes via Ellipsometry (E. Irene); Evaluation of Initial Stages of Heteroepitaxial Growth by Reflectance Spectroscopy and Transmission Electron Microscopy (K. Bachmann & S. Mahajan); Laser Reflection Interferometry for In Situ Real-Time Characterization of Film Growth Rate, Surface Roughness, and Optical Absorption. (T. McCauley, et al.); X-Ray Reflectivity for Studies of Surface and Interface Structure (E. Chason); Curvature-Based Techniques for Real-Time Stress Measurements During Thin-Film Growth (J. Floro & E. Chason); Photoelectron Emission Microscopy and Related Techniques for In Situ Real-Time Surface Studies (M. Kordesch); Index

Reviews

(SciTech Book News Vol. 25, No. 2 June 2001)

(SciTech Book News Vol. 25, No. 2 June 2001) Eight papers focus on a new generation of advanced electronic, optical, and other micro-/nano-devices involving the synthesis of materials in thin-film form. (SciTech Book News Vol. 25, No. 2 June 2001)

Author Information

ORLANDO AUCIELLO, PhD, is a Senior Scientist at the Argonne National Laboratory. ALAN R. KRAUSS, PhD, (deceased) was a Senior Scientist at the Argonne National Laboratory.

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