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OverviewA collection of papers on in-line characterization techniques for performance and yield enhancement in microelectronic manufacturing. They cover: electrical/field emission techniques; optical and em-wave techniques; and surface photovoltage techniques. Full Product DetailsAuthor: Ajuria , Tim Z. HossainPublisher: SPIE Press Imprint: SPIE Press Volume: Vol 3509 ISBN: 9780819429681ISBN 10: 0819429686 Pages: 254 Publication Date: 30 September 1998 Audience: Professional and scholarly , Professional & Vocational Format: Paperback Publisher's Status: Active Availability: To order Stock availability from the supplier is unknown. We will order it for you and ship this item to you once it is received by us. Table of ContentsReviewsAuthor InformationTab Content 6Author Website:Countries AvailableAll regions |