In-Line Characterization Techniques For Performance and Yield Enhancement In Microelectronic Manufacturing Ii-

Author:   Ajuria ,  Tim Z. Hossain
Publisher:   SPIE Press
Volume:   Vol 3509
ISBN:  

9780819429681


Pages:   254
Publication Date:   30 September 1998
Format:   Paperback
Availability:   To order   Availability explained
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In-Line Characterization Techniques For Performance and Yield Enhancement In Microelectronic Manufacturing Ii-


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Overview

A collection of papers on in-line characterization techniques for performance and yield enhancement in microelectronic manufacturing. They cover: electrical/field emission techniques; optical and em-wave techniques; and surface photovoltage techniques.

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Author:   Ajuria ,  Tim Z. Hossain
Publisher:   SPIE Press
Imprint:   SPIE Press
Volume:   Vol 3509
ISBN:  

9780819429681


ISBN 10:   0819429686
Pages:   254
Publication Date:   30 September 1998
Audience:   Professional and scholarly ,  Professional & Vocational
Format:   Paperback
Publisher's Status:   Active
Availability:   To order   Availability explained
Stock availability from the supplier is unknown. We will order it for you and ship this item to you once it is received by us.

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