High K Gate Dielectrics
Author:   M Houssa
Publisher:   CRC Press
ISBN:  

9786610650972


Pages:   613
Publication Date:   01 December 2003
Format:   Electronic book text
Availability:   Out of stock   Availability explained
The supplier is temporarily out of stock of this item. It will be ordered for you on backorder and shipped when it becomes available.

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High K Gate Dielectrics


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Overview

This book reviews the state-of-the-art in high permittivity gate dielectric research. Consisting of contributions from reseachers from Europe and the USA, the first chapter describes the various deposition techniques used for construction of layers at these dimensions. The second chapter considers characterisation techniques of the physical, chemical, structural and electronic properties of these materials. The third chapter reviews the theoretical work done in the field, and the final section is devoted to technological applications.

Full Product Details

Author:   M Houssa
Publisher:   CRC Press
Imprint:   CRC Press
ISBN:  

9786610650972


ISBN 10:   6610650977
Pages:   613
Publication Date:   01 December 2003
Audience:   General/trade ,  General
Format:   Electronic book text
Publisher's Status:   Active
Availability:   Out of stock   Availability explained
The supplier is temporarily out of stock of this item. It will be ordered for you on backorder and shipped when it becomes available.

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