Overview

Full Product Details

Author:   William B. Glendinning (Motorola, USA) ,  John N. Helbert (Motorola, USA)
Publisher:   William Andrew Publishing
Imprint:   William Andrew Publishing
Dimensions:   Width: 15.20cm , Height: 3.60cm , Length: 22.90cm
Weight:   1.030kg
ISBN:  

9780815512813

ISBN 10:   0815512813
Pages:   680
Publication Date:   19 July 2010
Audience:   College/higher education ,  General/trade ,  Professional and scholarly ,  Postgraduate, Research & Scholarly
Format:   Hardback
Publisher's Status:   Active
Availability:   In Print  
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Table of Contents

Issues and Trends Affecting Lithography Tool Selection Strategy Resist Technology ù Design, Processing, and Applications Lithography Process Monitoring and Defect Detection Techniques and Tools for Photo Metrology Techniques and Tools for Optical Lithography Microlithography Tool Automation Electron-Beam ULSI Applications Rational Vibration and Structural Dynamics for Lithographic Tool Installations Applications of Ion Microbeams Lithography and Direct Processing X-Ray Lithography Part I Part II Acknowledgment References Index

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Author Information

John Helbert is a Senior Member of the Motorola Technical Staff. He earned his doctorate in Physical

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