Overview
A book on deposition for engineers, technicians, and plant personnel in the semiconductor industry. It traces the technology behind the growth in the silicon semiconductor industry and the trend in miniaturization. It explains the growth of automatic tools capable of measuring thickness and spacing of sub-micron dimensions.
Full Product Details
Publisher: Elsevier Science & Technology
Imprint: Elsevier Science & Technology
ISBN: 9781282253025
ISBN 10: 1282253026
Publication Date: 01 February 2002
Audience:
General/trade
,
General
Format: Electronic book text
Publisher's Status: Active
Availability: In stock
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