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OverviewExplains and challenges concepts in nanotechnology. This book covers surface metrology and nanometrology and the areas where they overlap, thereby providing a quantitative means of controlling and predicting processes and performance. Trends and mechanisms are explained with numerous practical examples. Bringing engineering and physics together at the nanoscale reveals some astonishing effects - geometric features such as shape change meaning; roughness can disappear altogether; and signals from instruments have to be dealt with differently depending on scale. Many aspects of nanotechnology and precision engineering are considered in chapters on manufacture, characterization, standardization, performance and instrumentation. There is a special chapter on nanometrology and this subject permeates the whole book. Full Product DetailsAuthor: David J. Whitehouse (University of Warwick, Coventry, UK)Publisher: Taylor & Francis Ltd Imprint: Institute of Physics Publishing Dimensions: Width: 19.00cm , Height: 6.10cm , Length: 25.40cm Weight: 2.608kg ISBN: 9780750305839ISBN 10: 0750305835 Pages: 1150 Publication Date: 01 December 2002 Audience: College/higher education , Professional and scholarly , Undergraduate , Postgraduate, Research & Scholarly Replaced By: 9781420082012 Format: Hardback Publisher's Status: Out of Print Availability: Out of stock  Table of ContentsPreface Acknowledgments General Philosophy of Measurement Where does surface metrology fit in general metrology, and what about nanometrology? Importance of surface metrology Surface Characterization: The Nature of Surfaces Surface roughness characterization Waviness Errors of form Comparison of definitions for surface metrology and coordinate-measuring machines Characterization of defect shapes on the surface Summary References Processing Digital methods Digital properties of random surfaces Fourier transform and the fast Fourier transform Statistical parameters in digital form Properties and implementation of the ambiguity function and Wigner distribution function Digital estimation of reference lines for surface metrology Algorithms Transformations in surface metrology Surface generation References Instrumentation Introduction and history Measurement systems Optical techniques for the measurement of surfaces Capacitance techniques for measuring surfaces Inductance technique for measuring surfaces Impedance technique - skin effect Other nonstandard techniques Electron microscopy Merit of transducers References Traceability-Standardization-Variability Introduction Nature of errors Deterministic or systematic error model Basic components of accuracy evaluation Basic error theory for a system Propagation of errors Some useful statistical tests for surface metrology Uncertainty in instruments-calibration in general The calibration of stylus instruments Calibration of form instruments Variability of surface parameters National and international standards Specification on drawings Summary References Surface Metrology in Manufacture Introduction Manufacturing processes Cutting Abrasive processes Unconventional machining Ways of making structured surfaces Surface integrity Surface geometry-a fingerprint of manufacture Summary References Surface Geometry and Its Importance in Function Introduction Two-body interaction-the static situation Functional properties of contact Two-body interactions-dynamic effects Surface roughness, mechanical system life and designer surfaces One-body interactions One body with radiation (optical). The effect of roughness on the scattering of electromagnetic and other radiation Scattering by different sorts of waves System function Discussion Conclusions References Nanometrology Introduction Effect of scale on manufacture, functionality and instrument design Metrology at the nanoscale Stability of signal from metrology instruments as function of scale Calibration Noise Calibration artefacts Dynamics of calibration at nanometre level Software correction Nanometre metrology systems Methods of measuring length and surfaces to nanoscale results with interferometers and other devices Summary References Summary and Conclusions General Characterization Data processing Instrumentation Calibration Manufacture Surfaces and function Nanometrology Overview Glossary IndexReviewsThe Handbook of Surface and Nanometrology contains a wealth of information for both Practical and Research engineers. For Taylor Hobson the volume epitomises the nature of the art of surface metrology and instrument engineering, as could only be recorded through a lifetime of dedication to the subject. This book will give both guidance and food for thought for anyone interested in the subject at whatever level. -- Mr Bruce Wilson, Taylor Hobson The book is very useful to the colleagues of my Institute. It will be one of the best books in our library. Professor Yuri Chugui The Handbook of Surface and Nanometrology contains a wealth of information for both Practical and Research engineers. For Taylor Hobson the volume epitomises the nature of the art of surface metrology and instrument engineering, as could only be recorded through a lifetime of dedication to the subject. This book will give both guidance and food for thought for anyone interested in the subject at whatever level. Mr Bruce Wilson, Taylor Hobson ok is very useful to the colleagues of my Institute. It will be one of the best books in our library. Professor Yuri Chugui The Handbook of Surface and Nanometrology contains a wealth of information for both Practical and Research engineers. For Taylor Hobson the volume epitomises the nature of the art of surface metrology and instrument engineering, as could only be recorded through a lifetime of dedication to the subject. This book will give both guidance and food for thought for anyone interested in the subject at whatever level. Mr Bruce Wilson, Taylor Hobson Author InformationTab Content 6Author Website:Countries AvailableAll regions |
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