Handbook of Sputter Deposition Technology: Fundamentals and Applications for Functional Thin Films, Nano-Materials and MEMS
Author:   Kiyotaka Wasa (Matsushita Electric, Ltd. and Yokohama City University, Japan)
Publisher:   William Andrew Publishing
Edition:   2nd edition
ISBN:  

9781437734836


Pages:   660
Publication Date:   26 October 2012
Format:   Hardback
Availability:   Manufactured on demand   Availability explained
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Handbook of Sputter Deposition Technology: Fundamentals and Applications for Functional Thin Films, Nano-Materials and MEMS


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Author:   Kiyotaka Wasa (Matsushita Electric, Ltd. and Yokohama City University, Japan)
Publisher:   William Andrew Publishing
Imprint:   William Andrew Publishing
Edition:   2nd edition
Dimensions:   Width: 15.20cm , Height: 3.40cm , Length: 22.90cm
Weight:   1.030kg
ISBN:  

9781437734836


ISBN 10:   1437734839
Pages:   660
Publication Date:   26 October 2012
Audience:   Professional and scholarly ,  Professional and scholarly ,  Professional & Vocational ,  Professional & Vocational
Format:   Hardback
Publisher's Status:   Active
Availability:   Manufactured on demand   Availability explained
We will order this item for you from a manufactured on demand supplier.

Table of Contents

Thin Film and Nano-materials Thin Film and Nanomaterial Processes Sputtering Phenomena Computer Simulation of Sputtering Sputtering Systems Deposition of Compound Thin Films Nanometer Materials and Devices Microfabrications

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