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OverviewA concise, comprehensive overview of sputter deposition technology. Cathodic sputtering is widely used in the microelectronics industry for silicon integrated circuit production, and for metallurgical coatings. High temperature superconductors can be synthesized with sputtering under non-equilibrium thermal conditions. Diamond films and ferroelectric materials are other applications. Contents Include: Thin Film Materials and Devices Thin Film Processes Sputtering Phenomena Sputtering Systems Deposition of Compound Thin Films Microfabrication by Sputtering Future Directions. Full Product DetailsAuthor: Kiyotaka Wasa (Matsushita Electric, Ltd. and Yokohama City University, Japan) , Shigeru HayakawaPublisher: William Andrew Publishing Imprint: William Andrew Publishing Dimensions: Width: 15.20cm , Height: 1.80cm , Length: 22.90cm Weight: 0.570kg ISBN: 9780815512806ISBN 10: 0815512805 Pages: 316 Publication Date: 31 December 1992 Audience: Professional and scholarly , Professional & Vocational Replaced By: 9781437734836 Format: Hardback Publisher's Status: Out of Print Availability: Out of print, replaced by POD  We will order this item for you from a manufatured on demand supplier. Table of ContentsThin Film Materials and Devices Thin Film Processes Sputtering Phenomena Sputtering Systems Deposition of Compound Thin Films Microfabrication by Sputtering Future DirectionsReviews"""àcomprehensively covers state-of-the-art sputtering techniques and equipmentàthoroughly addresses all fundamental aspects."" - Materials and Processing Report" acomprehensively covers state-of-the-art sputtering techniques and equipmentathoroughly addresses all fundamental aspects. - Materials and Processing Report Author InformationTab Content 6Author Website:Countries AvailableAll regions |
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