Handbook of Sputter Deposition Technology: Principles, Technology and Applications. Materials Science and Process Technology Series.
Author:   Kiyotaka Wasa ,  Shigeru Hayakawa
Publisher:   William Andrew Publishing
ISBN:  

9781282002821


Pages:   316
Publication Date:   01 January 1992
Format:   Electronic book text
Availability:   In stock   Availability explained
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Handbook of Sputter Deposition Technology: Principles, Technology and Applications. Materials Science and Process Technology Series.


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Overview

A concise, comprehensive overview of sputter deposition technology-a key technology for materials research in the next decade. Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallurgical coatings. High temperature superconductors can be synthesized with sputtering under non-equilibrium conditions. Diamond films and ferroelectric materials are other applications.

Full Product Details

Author:   Kiyotaka Wasa ,  Shigeru Hayakawa
Publisher:   William Andrew Publishing
Imprint:   William Andrew Publishing
ISBN:  

9781282002821


ISBN 10:   1282002821
Pages:   316
Publication Date:   01 January 1992
Audience:   General/trade ,  General
Format:   Electronic book text
Publisher's Status:   Active
Availability:   In stock   Availability explained
We have confirmation that this item is in stock with the supplier. It will be ordered in for you and dispatched immediately.

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