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OverviewA description of cleanroom-based measurement technology used during the manufacture of silicon integrated circuits. It covers model-based, critical dimension, overlay, acoustic film thickness, dopant dose, junction depth, and electrical measurements; particle and defect detection; and flatness following chemical mechanical polishing. It surveys key areas such as optical measurements and in-line calibration methods. Full Product DetailsAuthor: C Diebold AlainPublisher: Taylor & Francis Group Imprint: Taylor & Francis Group ISBN: 9781280208447ISBN 10: 1280208449 Pages: 874 Publication Date: 01 January 2001 Audience: General/trade , General Format: Electronic book text Publisher's Status: Active Availability: In stock  We have confirmation that this item is in stock with the supplier. It will be ordered in for you and dispatched immediately. Table of ContentsReviewsAuthor InformationTab Content 6Author Website:Countries AvailableAll regions |
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