Overview

Part of a compilation of diverse information into a single, two-volume resource just at the moment when researchers are weighing the alternatives to visible light that will be necessary to etch features smaller than 0.13 microns. Volume Two focuses on the process technology and the device applicatio

Full Product Details

Author:   P. Rai-Choudhury
Publisher:   SPIE Press
Imprint:   SPIE Press
Edition:   illustrated Edition
Volume:   PM39-PM40
Dimensions:   Width: 19.00cm , Height: 4.20cm , Length: 26.70cm
Weight:   1.464kg
ISBN:  

9780819423795

ISBN 10:   0819423793
Pages:   698
Publication Date:   31 December 1997
Audience:   College/higher education ,  Professional and scholarly ,  General/trade ,  Undergraduate ,  Postgraduate, Research & Scholarly
Format:   Hardback
Publisher's Status:   Active
Availability:   Temporarily unavailable  
The supplier advises that this item is temporarily unavailable. It will be ordered for you and placed on backorder. Once it does come back in stock, we will ship it out to you.

Table of Contents

v. 1. Microlithography -- v. 2. Micromachining and microfabrication.

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