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Author:   Frederick Peter Lisowski (Univ Of Tasmania, Australia & Emeritus Professor, Univ Of Hong Kong)
Publisher:   World Scientific Publishing Co Pte Ltd
Imprint:   World Scientific Publishing Co Pte Ltd
Dimensions:   Width: 15.20cm , Height: 2.30cm , Length: 23.00cm
Weight:   0.585kg
ISBN:  

9789810235697

ISBN 10:   9810235690
Pages:   432
Publication Date:   16 December 1998
Audience:   College/higher education ,  Professional and scholarly ,  General/trade ,  Undergraduate ,  Postgraduate, Research & Scholarly
Format:   Paperback
Publisher's Status:   Active
Availability:   Out of stock  
The supplier is temporarily out of stock of this item. It will be ordered for you on backorder and shipped when it becomes available.

Table of Contents

Introduction to infrared spectroscopy; the properties of infared transparent substrates; the measurement of oxygen and carbon in silicon; the calculation of epitexial layer thickness; the characterization of silicon dioxide and silicon nitride thin films; the characterization of PSG and BPSG; the characterization of amorphous silicon and related materials; miscellaneous applications of infrared spectroscopy in microelectronics.

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