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OverviewGettering Defects in Semiconductors fulfills three basic purposes: -- to systematize the experience and research in exploiting various gettering techniques in microelectronics and nanoelectronics; -- to identify new directions in research, particularly to enhance the perspective of professionals and young researchers and specialists; -- to fill a gap in the contemporary literature on the underlying semiconductor-material theory. The authors address not only well-established gettering techniques but also describe contemporary trends in gettering technologies from an international perspective. The types and properties of structural defects in semiconductors, their generating and their transforming mechanisms during fabrication are described. The primary emphasis is placed on classifying and describing specific gettering techniques, their specificity arising from both their position in a general technological process and the regimes of their application. This book addresses both engineers and material scientists interested in semiconducting materials theory and also undergraduate and graduate students in solid--state microelectronics and nanoelectronics. A comprehensive list of references provides readers with direction for further reading. Full Product DetailsAuthor: Victor A. Perevostchikov , Victor Gloumov , Vladimir D. SkoupovPublisher: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG Imprint: Springer-Verlag Berlin and Heidelberg GmbH & Co. K Edition: Softcover reprint of hardcover 1st ed. 2005 Volume: 19 Dimensions: Width: 15.50cm , Height: 2.10cm , Length: 23.50cm Weight: 0.617kg ISBN: 9783642065705ISBN 10: 3642065708 Pages: 388 Publication Date: 21 October 2010 Audience: Professional and scholarly , Professional & Vocational Format: Paperback Publisher's Status: Active Availability: In Print This item will be ordered in for you from one of our suppliers. Upon receipt, we will promptly dispatch it out to you. For in store availability, please contact us. Table of ContentsReviewsAuthor InformationTab Content 6Author Website:Countries AvailableAll regions |