GaP Heteroepitaxy on Si(100): Benchmarking Surface Signals when Growing GaP on Si in CVD Ambients

Author:   Henning Döscher
Publisher:   Springer International Publishing AG
Edition:   2013 ed.
ISBN:  

9783319028798


Pages:   143
Publication Date:   11 December 2013
Format:   Hardback
Availability:   Manufactured on demand   Availability explained
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GaP Heteroepitaxy on Si(100): Benchmarking Surface Signals when Growing GaP on Si in CVD Ambients


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Overview

Epitaxial integration of III-V semiconductors on silicon substrates has been desired over decades for high application potential in microelectronics, photovoltaics, and beyond. The performance of optoelectronic devices is still severely impaired by critical defect mechanisms driven by the crucial polar-on-nonpolar heterointerface. This thesis reports almost lattice-matched growth of thin gallium phosphide films as a viable model system for III-V/Si(100) interface investigations. The impact of antiphase disorder on the heteroepitaxial growth surface provides quantitative optical in situ access to one of the most notorious defect mechanisms, even in the vapor phase ambient common for compound semiconductor technology. Precise control over the surface structure of the Si(100) substrates prior to III-V nucleation prevents the formation of antiphase domains. The hydrogen-based process ambient enables the preparation of anomalous double-layer step structures on Si(100), highly beneficial for subsequent III-V integration.

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Author:   Henning Döscher
Publisher:   Springer International Publishing AG
Imprint:   Springer International Publishing AG
Edition:   2013 ed.
Dimensions:   Width: 15.50cm , Height: 1.30cm , Length: 23.50cm
Weight:   3.672kg
ISBN:  

9783319028798


ISBN 10:   3319028790
Pages:   143
Publication Date:   11 December 2013
Audience:   Professional and scholarly ,  Professional & Vocational
Format:   Hardback
Publisher's Status:   Active
Availability:   Manufactured on demand   Availability explained
We will order this item for you from a manufactured on demand supplier.

Table of Contents

Introduction.- Experimental.- Si(100) surfaces in chemical vapor environments.- GaP(100) and InP(100) surfaces.- GaP growth on Si(100) and anti-phase disorder.- Conclusion.

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Author Information

Dr. Henning Döscher TU Ilmenau Institut für Physik, FG Photovoltaik Ehrenbergstr. 29 98693 Ilmenau

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