Overview

MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world.A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field.Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem.N ew in the Second EditionoRevised chapters that reflect the many recent advances in the fieldoUpdated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology oIn-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs. oMany more links to the WeboProblem sets in each chapter

Full Product Details

Author:   Marc J. Madou (University of California, Irvine, USA)
Publisher:   Taylor & Francis Inc
Imprint:   CRC Press Inc
Edition:   2nd New edition
Dimensions:   Width: 21.60cm , Height: 4.70cm , Length: 27.90cm
Weight:   2.024kg
ISBN:  

9780849308260

ISBN 10:   0849308267
Pages:   752
Publication Date:   13 March 2002
Audience:   College/higher education ,  Professional and scholarly ,  Undergraduate ,  Postgraduate, Research & Scholarly
Format:   Hardback
Publisher's Status:   Out of Stock Indefinitely
Availability:   In Print  
Limited stock is available. It will be ordered for you and shipped pending supplier's limited stock.

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Reviews

The Fundamentals of Microfabrication describes the science of miniaturization, which demonstrates ways of making devices using smaller and smaller materials. This book brings an understanding of manufacturing options, material choices, and size...This book is well written and very informative for anyone interested in this area of engineering and could be used in an advanced course for the study of microfabrication. -Diane Kauzlarick, EET

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