Fundamental Principles of Engineering Nanometrology

Author:   Richard Leach (National Physical Laboratory, UK)
Publisher:   William Andrew Publishing
Edition:   2nd edition
ISBN:  

9781455777532


Pages:   384
Publication Date:   10 June 2014
Format:   Hardback
Availability:   Manufactured on demand   Availability explained
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Fundamental Principles of Engineering Nanometrology


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Overview

Working at the nano-scale demands an understanding of the high-precision measurement techniques that make nanotechnology and advanced manufacturing possible. Richard Leach introduces these techniques to a broad audience of engineers and scientists involved in nanotechnology and manufacturing applications and research. He also provides a routemap and toolkit for metrologists engaging with the rigor of measurement and data analysis at the nano-scale. Starting from the fundamentals of precision measurement, the author progresses into different measurement and characterization techniques. The focus on nanometrology in engineering contexts makes this book an essential guide for the emerging nanomanufacturing / nanofabrication sector, where measurement and standardization requirements are paramount both in product specification and quality assurance. This book provides engineers and scientists with the methods and understanding needed to design and produce high-performance, long-lived products while ensuring that compliance and public health requirements are met. Updated to cover new and emerging technologies, and recent developments in standards and regulatory frameworks, this second edition includes many new sections, e.g. new technologies in scanning probe and e-beam microscopy, recent developments in interferometry and advances in co-ordinate metrology.

Full Product Details

Author:   Richard Leach (National Physical Laboratory, UK)
Publisher:   William Andrew Publishing
Imprint:   William Andrew Publishing
Edition:   2nd edition
Dimensions:   Width: 19.10cm , Height: 2.30cm , Length: 23.50cm
Weight:   1.040kg
ISBN:  

9781455777532


ISBN 10:   1455777536
Pages:   384
Publication Date:   10 June 2014
Audience:   Professional and scholarly ,  Professional & Vocational
Format:   Hardback
Publisher's Status:   Active
Availability:   Manufactured on demand   Availability explained
We will order this item for you from a manufactured on demand supplier.

Table of Contents

1. Introduction to metrology for micro- and nanotechnology 2. Some basics of measurement 3. Precision measurement instrumentation - some design principles 4. Length traceability using interferometry 5. Displacement measurement 6. Surface topography measurement instrumentation 7. Scanning probe and particle beam microscopy 8. Surface topography characterization 9. Co-ordinate metrology 10. Mass and force measurement

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Richard Leach is a Principal Research Scientist in the Mass & Dimensional Group, Industry & Innovati

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