Overview

As the semiconductor industry continues to move toward silicon nanoelectronics and beyond, the introduction of new materials, innovative processing and assembly, and novel devices brings formidable metrology challenges. This book emphasizes the frontiers of innovation in the characterization and metrology needed to advance nanoelectronics.

Full Product Details

Author:   Erik M. Secula (National Institute of Standards and Technology) ,  David G. Seiler ,  Rajinder P. Khosla (National Science Foundation) ,  Dan Herr
Publisher:   American Institute of Physics
Imprint:   American Institute of Physics
Volume:   v. 1173
Dimensions:   Width: 21.60cm , Height: 2.80cm , Length: 27.90cm
Weight:   1.247kg
ISBN:  

9780735407121

ISBN 10:   0735407126
Pages:   320
Publication Date:   26 October 2009
Audience:   Professional and scholarly ,  Professional & Vocational
Format:   Hardback
Publisher's Status:   Active
Availability:   In Print  
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