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OverviewThis book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). Concepts of resonance are introduced, with an overview of fabrication techniques for micromachined devices – important to understand as design options will depend on how the device will be fabricated. Also explained: excitation and signal detection methods; an analytic model of device behavior (a valuable design tool); numerical simulation techniques; issues of damping and noise for resonant MEMS; electronic interfacing; packaging issues; and numerous examples of resonant MEMS from academia and industry. Full Product DetailsAuthor: Behraad Bahreyni (Cambridge University, UK)Publisher: William Andrew Publishing Imprint: William Andrew Publishing Dimensions: Width: 17.50cm , Height: 2.00cm , Length: 24.40cm Weight: 0.570kg ISBN: 9780815515777ISBN 10: 0815515774 Pages: 250 Publication Date: 20 October 2008 Audience: Professional and scholarly , Professional & Vocational Format: Hardback Publisher's Status: Active Availability: In Print  This item will be ordered in for you from one of our suppliers. Upon receipt, we will promptly dispatch it out to you. For in store availability, please contact us. Table of ContentsMicrofabrication Actuation mechanisms Sensing techniques Modeling Damping mechanisms Interfacing Noise Packaging Survey of applicationsReviewsAuthor InformationTab Content 6Author Website:Countries AvailableAll regions |
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