Overview

This book presents an updated, systematic review of the latest developments in diamond CVD processes, with emphasis on the nucleation and early growth stages of diamond CVD. The objective of this book is to familiarize the reader with the scientific and engineering aspects of diamond CVD, and to provide experienced researchers, scientists, and engineers in academic and industrial communities with the latest developments in this growing field. The scope of the book encompasses the developments and applications of diamond CVD, starting with a brief description of atomic and crystal structures of diamond and review of the various processing techniques used. It is followed by an extensive discussion of fundamental phenomena, principles and processes involved in diamond CVD, with emphasis on the nucleation and early growth stages of diamond during CVD. Diamond nucleation mechanisms, epitaxy and oriented growth are discussed on the basis of experimental observations. The nucleation enhancement methods developed to date are summarized. The effects of surface conditions and deposition parameters on surface nucleation are described. Finally, theoretical and modelling studies on surface nucleation are reviewed. Contents Include: Introduction Atomic and Crystal Structures of Diamond. Diamond CVD Techniques : Hot-Filament CVD Plasma Assisted CVD Flame CVD Summary of General Characteristics of Diamond CVD Processes. Diamond Nucleation Mechanisms: Homogeneous Nucleation Gas Phase Nucleation Heterogeneous Nucleation Surface Nucleation. Diamond Epitaxy, Oriented Growth, and Morphology Evolution: Epitaxy Oriented and Textured Growth Morphology Evolution. Effects of Surface Conditions on Diamond Nucleation: Substrate Materials Surface Pretreatment Methods and Nucleation Enhancement Mechanisms. Effects of Deposition Conditions on Diamond Nucleation: Substrate Temperature Gas-Phase Activation Gas Pressure and Flow Rate Gas Composition Oxygen Addition. Theoretical and Modeling Studies on Diamond Nucleation: Identification of Nucleation and Growth Mode Theoretical Studies on Nucleation Thermodynamics Theoretical Modeling of Nucleation Kenetics Clues of Structure, Chemistry and Size of Diamond Nuclei.

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