Design Test and Microfabrication of Mems and Moems

Author:   Crary ,  Selden B. Crary ,  Wolfgang Ehrfeld ,  Hiroyuki Fujita
Publisher:   SPIE Press
Volume:   v. 3680
ISBN:  

9780819431547


Pages:   1230
Publication Date:   31 May 1999
Format:   Paperback
Availability:   To order   Availability explained
Stock availability from the supplier is unknown. We will order it for you and ship this item to you once it is received by us.

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Design Test and Microfabrication of Mems and Moems


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Author:   Crary ,  Selden B. Crary ,  Wolfgang Ehrfeld ,  Hiroyuki Fujita
Publisher:   SPIE Press
Imprint:   SPIE Press
Volume:   v. 3680
ISBN:  

9780819431547


ISBN 10:   0819431540
Pages:   1230
Publication Date:   31 May 1999
Audience:   Professional and scholarly ,  Professional & Vocational
Format:   Paperback
Publisher's Status:   Active
Availability:   To order   Availability explained
Stock availability from the supplier is unknown. We will order it for you and ship this item to you once it is received by us.

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