Computational Modeling in Semiconductor Processing

Author:   M. Meyyappan
Publisher:   Artech House Publishers
Edition:   Unabridged edition
ISBN:  

9780890067079


Pages:   363
Publication Date:   31 August 1994
Format:   Hardback
Availability:   Out of stock   Availability explained
The supplier is temporarily out of stock of this item. It will be ordered for you on backorder and shipped when it becomes available.

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Computational Modeling in Semiconductor Processing


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Author:   M. Meyyappan
Publisher:   Artech House Publishers
Imprint:   Artech House Publishers
Edition:   Unabridged edition
Dimensions:   Width: 15.20cm , Height: 2.50cm , Length: 22.90cm
Weight:   0.658kg
ISBN:  

9780890067079


ISBN 10:   0890067074
Pages:   363
Publication Date:   31 August 1994
Audience:   College/higher education ,  Professional and scholarly ,  Postgraduate, Research & Scholarly ,  Professional & Vocational
Format:   Hardback
Publisher's Status:   Active
Availability:   Out of stock   Availability explained
The supplier is temporarily out of stock of this item. It will be ordered for you on backorder and shipped when it becomes available.

Table of Contents

A review of numerical methods; crystal growth; chemical vapour deposition processes; plasma modelling processes; rapid thermal processing.

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