Chemical Mechanical Planarization of Microelectronic Materials
Author:   Joseph M Steigerwald ,  Murarka Gutmann ,  Ronald J Gutmann ,  Shyam P Murarka (Rensselaer Polytechnic Institute, New York)
Publisher:   Wiley-Vch
ISBN:  

9781281843142


Pages:   337
Publication Date:   01 January 2008
Format:   Electronic book text
Availability:   In stock   Availability explained
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Chemical Mechanical Planarization of Microelectronic Materials


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Author:   Joseph M Steigerwald ,  Murarka Gutmann ,  Ronald J Gutmann ,  Shyam P Murarka (Rensselaer Polytechnic Institute, New York)
Publisher:   Wiley-Vch
Imprint:   Wiley-Vch
ISBN:  

9781281843142


ISBN 10:   1281843148
Pages:   337
Publication Date:   01 January 2008
Audience:   General/trade ,  General
Format:   Electronic book text
Publisher's Status:   Active
Availability:   In stock   Availability explained
We have confirmation that this item is in stock with the supplier. It will be ordered in for you and dispatched immediately.

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