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OverviewThe worldwide semiconductor community faces increasingly difficult challenges in the era of silicon nanotechnology and beyond. The magnitude of these challenges demands special attention from the metrology and analytical measurements community. New paradigms must be found. Adequate research and development for new metrology concepts are urgently needed. Characterization and metrology are key enablers for developing new semiconductor technology and in improving manufacturing. This book summarizes major issues and gives critical reviews of important measurement techniques that are crucial to continuing the advances in semiconductor technology. It covers major aspects of process technology and most characterization techniques for silicon research, including development, manufacturing, and diagnostics. The book also covers emerging nano-devices and the corresponding metrology challenges that arise. Full Product DetailsAuthor: David G. Seiler (National Institute of Standards and Technology) , Alain C. Diebold , Robert McDonald , Caroline R. AyrePublisher: American Institute of Physics Imprint: American Institute of Physics Volume: v.788 Dimensions: Width: 21.40cm , Height: 4.30cm , Length: 27.80cm Weight: 1.891kg ISBN: 9780735402775ISBN 10: 0735402779 Pages: 687 Publication Date: 01 September 2005 Audience: Professional and scholarly , Professional & Vocational Format: Hardback Publisher's Status: Active Availability: Out of stock  The supplier is temporarily out of stock of this item. It will be ordered for you on backorder and shipped when it becomes available. Table of ContentsReviewsAuthor InformationTab Content 6Author Website:Countries AvailableAll regions |
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