Overview

The proceedings of the 1998 International Conference on Characterization and Metrology for ULSI Technology was dedicated to summarizing major issues and giving critical reviews of important semiconductor techniques that are crucial to continue the advances in semiconductor technology. Characterization and metrology are key enablers for developing semiconductor process technology and in improving manufacturing. This is the only book that we know of that emphasizes the science and technology of semiconductor characterization in the factory environment. The increasing importance of monitoring and controlling semiconductor processes make it particularly timely.

Full Product Details

Author:   David G. Seiler ,  A.C. Diebold ,  W.M. Bullis ,  T. J. Shaffner
Publisher:   American Institute of Physics
Imprint:   American Institute of Physics
Volume:   v.449
Dimensions:   Width: 22.20cm , Height: 5.60cm , Length: 27.90cm
Weight:   2.427kg
ISBN:  

9781563967535

ISBN 10:   1563967537
Pages:   1025
Publication Date:   14 December 1998
Audience:   Professional and scholarly ,  General/trade ,  College/higher education ,  Professional & Vocational ,  General
Format:   Mixed media product
Publisher's Status:   Active
Availability:   Out of stock  
The supplier is temporarily out of stock of this item. It will be ordered for you on backorder and shipped when it becomes available.

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