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OverviewThis text introduces the principles of scanning probe systems with particular emphasis on techniques for increasing speed. The authors include useful information on the characteristics and limitations of state-of-the-art machines, as well as the properties of the systems that will follow in the future. The basic approach is two-fold. First, fast scanning systems for single probes are treated and, second, systems with multiple probes operating in parallel are presented. The key components of the SPM are the mechanical microcantilever with integrated tip and the systems used to measure its deflection. In essence, the entire apparatus is devoted to moving the tip over a surface with a well-controlled force. The mechanical response of the actuator that governs the force is of the utmost importance since it determines the scanning speed. The mechanical response relates directly to the size of the actuator, smaller is faster. Traditional scanning probe microscopes rely on piezoelectric tubes of centimeter size to move the probe. Full Product DetailsAuthor: Stephen C. Minne , Scott R. Manalis , Calvin F. QuatePublisher: Springer Imprint: Springer Edition: 1999 ed. Volume: 3 Dimensions: Width: 15.50cm , Height: 1.10cm , Length: 23.50cm Weight: 0.940kg ISBN: 9780792384663ISBN 10: 0792384660 Pages: 159 Publication Date: 28 February 1999 Audience: Professional and scholarly , Professional & Vocational Format: Hardback Publisher's Status: Active Availability: In Print  This item will be ordered in for you from one of our suppliers. Upon receipt, we will promptly dispatch it out to you. For in store availability, please contact us. Table of Contents1 Improving Conventional ScanningProbe Microscopes.- 2 Design of Piezoresistive Cantilevers with Integrated Actuators.- 3 Increasing the Speed of Imaging.- 4 Cantilevers with Interdigital DeflectionSensors.- 5 Operation of the Interdigital Cantilever.- 6 Cantilever Arrays.- 7 Scanning Probes for Information Storage and Retrieval.- 8 Silicon Process Flow: ZnO actuatorand piezoresistive sensor.- 9 Silicon Process Flow: InterdigitalCantilever.Reviews`The presentation is clear and easy to follow, written by hands-on persons. There is a wealth of technical detail and useful diagrams. ...for persons who are serious fabricators of SPM...it is essential reading.' The Physicist, 37:2 (2000) 'The presentation is clear and easy to follow, written by hands-on persons. There is a wealth of technical detail and useful diagrams. ...for persons who are serious fabricators of SPM...it is essential reading.' The Physicist, 37:2 (2000) The presentation is clear and easy to follow, written by hands-on persons. There is a wealth of technical detail and useful diagrams. ...for persons who are serious fabricators of SPM...it is essential reading.' The Physicist, 37: 2 (2000) 'The presentation is clear and easy to follow, written by hands-on persons. There is a wealth of technical detail and useful diagrams. ...for persons who are serious fabricators of SPM...it is essential reading.' The Physicist, 37:2 (2000) Author InformationTab Content 6Author Website:Countries AvailableAll regions |
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