Overview

This comprehensive monograph summarises the 30-year studies of borophosphosilicate glass (BPSG) thin film used in electronic technologies, including the authors personal experience with the film deposition, characterisation, and implementation in microelectronic technology. The main core of the monograph is the interrelation of chemical vapour deposition (CVD) kinetic features, thin film material properties, and electronic device technology aspects. Part one of the monograph is devoted to the analysis of thin film synthesis, such as: CVD methodology and BPSG film processes, silicon dioxide and glass film growth kinetics, CVD step coverage and gap-fill features. Part two of the book is a description of BPSG film properties, film structure, glass flow capability, BPSG film-moisture interaction and the film defect formation phenomenon. A number of experimental data are presented and discussed in detail.

Full Product Details

Author:   Vladislav Yu Vasilyev
Publisher:   Nova Science Publishers Inc
Imprint:   Nova Science Publishers Inc
Weight:   0.640kg
ISBN:  

9781624179594

ISBN 10:   1624179592
Pages:   222
Publication Date:   01 July 2013
Audience:   College/higher education ,  Professional and scholarly ,  Postgraduate, Research & Scholarly ,  Professional & Vocational
Format:   Hardback
Publisher's Status:   Active
Availability:   In stock  
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Table of Contents

Introduction; Brief Historical Overview of BPSG Thin Film Research; Basic BPSG Film CVD Tools & Methodology; Basic BPSG CVD Kinetic Features; As-Deposited BPSG Film Step Coverage & Gap-Fill; Glass Film CVD Schemes; BPSG Film Industrial CVD Technology; Brief Review on BPSG Thin Film Analysis Techniques; BPSG Film Composition; BPSG Film Structure; Basic BPSG Film Properties; BPSG Film Flow Capability; BPSG Film Ambient Moisture Interaction; Defect Formation Phenomenon in BPSG Films; Interrelation of BPSG Film Deposition, Composition, Structure, & Properties; Thermally Induced BPSG Film Viscous Flow On Stepped IC Device Structures; BPSG Film Composition Optimization; BPSG Film Durability; BPSG Films in Electronic Technologies; Conclusion; Index.

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