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OverviewAn Introduction to Surface-Micromachining provides for the first time a unified view of surface-micromachining. Building up from the basic building block of microfabrication techniques, to the general surface-micromachining design, it will finish with the theory and design of concrete components. An Introduction to Surface-Micromachining connects the manufacturing process, microscale phenomena, and design data to physical form and function. This book will be of interest to mechanical engineers looking to scale down into micromachining and microelectronics designers looked to move horizontally to micromachining. Full Product DetailsAuthor: Robert W. Johnstone , Ash ParmaswaranPublisher: Springer-Verlag New York Inc. Imprint: Springer-Verlag New York Inc. Edition: 2004 ed. Dimensions: Width: 15.50cm , Height: 1.20cm , Length: 23.50cm Weight: 1.040kg ISBN: 9781402080203ISBN 10: 1402080204 Pages: 189 Publication Date: 03 June 2004 Audience: Professional and scholarly , Professional & Vocational Format: Hardback Publisher's Status: Active Availability: Out of print, replaced by POD  We will order this item for you from a manufatured on demand supplier. Table of Contents1. Introduction.- 1.1 Why miniaturize?.- 1.2 Why surface-micromachining?.- 1.3 History.- References.- I Fabrication.- 2. Microfabrication Processes.- 3. Micromachining Technologies.- II Design.- 4. Microscale Physics.- 5. Mechanics.- 6. Design Rules.- 7. Non-Ideal Processes.- 8. Design Techniques.- III Devices.- 9. Electrical Components.- 10. Mechanical Components.- 11. Electrostatic Actuators.- 12. Electro-Thermal-Compliant Actuators.- 13. Raised Structures.- IV Processes.- 14. PolyMUMPsTM Process.- 15. SUMMiTTM Process.- 16. MUSiC® Process.ReviewsAuthor InformationTab Content 6Author Website:Countries AvailableAll regions |
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