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OverviewAn Introduction to Surface-Micromachining provides for the first time a unified view of surface-micromachining. Building up from the basic building block of microfabrication techniques, to the general surface-micromachining design, it will finish with the theory and design of concrete components. An Introduction to Surface-Micromachining connects the manufacturing process, microscale phenomena, and design data to physical form and function. This book will be of interest to mechanical engineers looking to scale down into micromachining and microelectronics designers looking to move horizontally to micromachining. Full Product DetailsAuthor: Robert W. Johnstone , Ash ParmaswaranPublisher: Springer-Verlag New York Inc. Imprint: Springer-Verlag New York Inc. Edition: Softcover reprint of the original 1st ed. 2004 Dimensions: Width: 15.50cm , Height: 1.10cm , Length: 23.50cm Weight: 0.320kg ISBN: 9781475710779ISBN 10: 1475710771 Pages: 189 Publication Date: 12 December 2012 Audience: Professional and scholarly , Professional & Vocational Format: Paperback Publisher's Status: Active Availability: Manufactured on demand  We will order this item for you from a manufactured on demand supplier. Table of Contents1. Introduction.- 1.1 Why miniaturize?.- 1.2 Why surface-micromachining?.- 1.3 History.- References.- I Fabrication.- 2. Microfabrication Processes.- 3. Micromachining Technologies.- II Design.- 4. Microscale Physics.- 5. Mechanics.- 6. Design Rules.- 7. Non-Ideal Processes.- 8. Design Techniques.- III Devices.- 9. Electrical Components.- 10. Mechanical Components.- 11. Electrostatic Actuators.- 12. Electro-Thermal-Compliant Actuators.- 13. Raised Structures.- IV Processes.- 14. PolyMUMPsTM Process.- 15. SUMMiTTM Process.- 16. MUSiC® Process.ReviewsAuthor InformationTab Content 6Author Website:Countries AvailableAll regions |
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